Physics/Mathematics Graduation Internship: Improving Overlay Using Machine Full-time

Introduction

Are you a master student in Physics, Mathematics or a related field looking for a graduation internship? Do you have a good understanding of programming in MATLAB and GIT and have experience with machine learning and data science? Then this internship might be interesting for you!

Background information

Before delivering our machines to customers, ASML conducts a thorough system setup. This is crucial to ensure that the machine can meet certain Key Performance Indicators (KPI). Overlay is one of the KPIs in ASML’s system setup. Overlay is layer-to-layer mis-alignment on a multi-layer device structure. Once a customer begins using an ASML lithography machine in their production line, the machine may drift from its calibrated state, leading to overlay errors.

BaseLiner Overlay is a product to monitor and maintain overlay performance of ASML machines over time. It uses mathematical models to describe machine drift and to correct the drift in order to improve overlay.

Your assignment

Thousands of ASML lithography machines currently operate in customer factories, using BaseLiner to correct overlay drift. We aim to improve the drift control models of ASML machines by studying long-term drifting patterns. Advanced statistics approaches are promising methods for such investigation where they can combine historical scanner knowledge and the overlay data. In ASML, we have been using such statistical methods and they have shown overlay improvement in isolated cases. For further investigation, this internship assignment aims to detect and quantify persistent overlay improvements by investigating a larger data set systematically.

This internship will provide you with insights into the overlay performance of ASML lithography machines. You will also learn how ASML maintains machine performance via drift control strategy. As for hands-on experience, you will deploy your MATLAB skills to analyze mathematical models and statistical toolbox, to interpret real machine population data and to link them to a physical mechanism by talking to experts.

Your tasks will include writing a test plan, collecting and preprocessing appropriate data sets, applying advanced machine learning and statistical tools to the processed data sets with various model settings, performing proof book analysis, and presenting and writing reports.

The goal is to help the overlay integration group in choosing the path to follow with respect to potential future overlay control product improvements: do we expect benefit in changing the current overlay control model; if so, which part of the current model can be improved, and what will the impact be?

Your Profile

To be a perfect match for this internship, you:

• Are a master student in Physics, Mathematics or a related field.
• Have affinity with all or some of the following: statistical analysis, Bayesian inference, Gaussian Processes, machine learning, data science.
• Have a good understanding of programming in MATLAB & GIT.
• Have a hands-on mentality with a proactive attitude.
• Have strong communication skills and are fluent in English both verbally and in writing.

This is a master graduation internship with a duration of a minimum of 8 months, for 4-5 days a week, starting as soon as possible.

Please note that we can only consider students who are enrolled at an educational institution for the entire duration of the internship.

Leading with purpose

At ASML, we’ve been making giant leaps in microchip manufacturing technology since 1984, with more than 42.000 employees and over 60 locations globally. It’s a common misconception that we make microchips, but we actually design and manufacture the lithography machines that produce microchips.

We’re the world’s leading supplier for the semiconductor industry and we take this responsibility very seriously. We strive to be a force for good in the world. Whether enabling energy transition, AI or helping make healthcare more accessible, the work we do at ASML helps unlock the potential of people and society.

Learning and growing

Working at ASML is a journey; an opportunity to never stop learning and growing and we see it as our responsibility

to help you unlock your potential. We offer training and development opportunities, including educational

assistance. Here at ASML, you will find an environment where you can take up multiple growth opportunities, master your competencies and make your mark in a variety of ways.

Belong at ASML

We believe you’ll do your best work when you’re supported by an inclusive environment where you can bring your full self to work. At ASML, you’ll feel welcome, recognized and supported by a company that helps you thrive. We’re a highly diverse group of people. No matter who you are in our company, you can have a real influence. You’ll be empowered by flexible working and well-being programs, as well as participate in employee networks such as: ‘Women’, ‘Sports’, ‘Green’, ‘Expats’, and more!

This position requires access to controlled technology, as defined in the Export Administration Regulations (15 C.F.R. § 730, et seq.). Qualified candidates must be legally authorized to access such controlled technology prior to beginning work. Business demands may require ASML to proceed with candidates who are immediately eligible to access controlled technology.

Diversity and inclusion

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that diversity and inclusion is a driving force in the success of our company.

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